Musannaf Ibn Abi Shayba 18:801

Abu Bakr narrated to us, he said: Abu Khalid narrated to us, from Hisham ibn Urwah, from his father, who said regarding the fetus: If it is delivered alive, then the blood money (diyah) is due for it. If it is delivered dead, then a ghurra (a slave or slave-girl) is due for it.