Musannaf Ibn Abi Shayba 3:181

Abu Bakr narrated to us, he said: Ibn Numayr and Abu Mu'awiyah narrated to us, from al-A'mash, from Sa'd ibn 'Ubaydah, from al-Mustawrid ibn al-Ahnaf, from Silah ibn Zufar, from Hudhayfah, who said: I prayed with the Prophet, may Allah bless him and grant him peace. When he bowed, he began to say: "Glory be to my Lord, the Magnificent" (Subhana Rabbi al-'Azim). Then he prostrated and said: "Glory be to my Lord, the Most High" (Subhana Rabbi al-A'la).