Musannaf Ibn Abi Shayba 21:194

Ubaydah ibn Humayd narrated to us, from Mansur, from Abu Ma’shar, who said: It was narrated to me that the Messenger of Allah (peace and blessings of Allah be upon him) used to say when he went to his bed: "O Allah, grant me well-being in my religion, grant me well-being in my body, and grant me well-being in my sight, and make it the inheritor from me. There is no god but Allah, the Most High, the Almighty. Glory be to the Lord of the seven heavens and the Lord of the Noble Throne. Praise be to Allah, Lord of the worlds."