Musnad Ahmad 962:41

Bahz narrated to us, Hammad ibn Salamah narrated to us, Ya'la ibn 'Ata informed us that he heard an elder from the people of Damascus, that he heard Abu Umamah al-Bahili saying: When the Messenger of Allah (peace and blessings of Allah be upon him) would enter into the prayer at night, he would say "Allahu Akbar" three times, "Subhan Allah" three times, and "La ilaha illallah" three times. Then he would say: "O Allah, I seek refuge in You from the accursed Satan, from his madness (hamz), his blowing (nafkh), and his pride (shirk)."